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Vibrating beam accelerometer
The electrodes are driven by a high frequency voltage (1 MHz). The displacement is measured using a phase detector from the change ofcapacitance between the cantilever and the electrodes. The frequency responce is typically up to 500-2500 Hz.A vibrating beam accelerometer can be implemented using Micro Electro-Mechanical Systems (MEMS):
square wave generator using op amp
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