Explain mask alignment and exposure, Chemical Engineering

Assignment Help:

Mask Alignment and Exposure

One of the most significant steps in the photolithography process is mask alignment. A mask or "photomask" is a square glass plate with a patterned emulsion of metal film on single side. The mask is aligned with the wafer, so that the pattern can be transfer onto the wafer surface. Every mask after the first one must be aligned to the last pattern.

Once the mask has been accurately allied with the pattern on the wafer's surface, the photo resist is exposed by the pattern on the mask with a high intensity ultraviolet light. There are three primary exposure methods: contact,  proximity, and projection. They are shown in the figure below.  

 

2123_Untitled.png


Related Discussions:- Explain mask alignment and exposure

Reaction, reaction between water and petrol engine exhaust gas(contain n2=7...

reaction between water and petrol engine exhaust gas(contain n2=71%, co2=21% ,co=1.5%)

Semi-conducting materials, Semi-conducting materials            1) Semi...

Semi-conducting materials            1) Semi-conducting are the materials whose valence electrons are bounded somewhat loosely to their atom. 2) They needs energy less than

Bernoulli equations, air flows through apipe at arte of 200L/S. The pipe of...

air flows through apipe at arte of 200L/S. The pipe of two sections of diameters 20cm and 10cm with asmoth reducing section the pressure are difference between the two pipe sectio

Emf, define emf and its application

define emf and its application

#esterification, what do i do to eliminate odor from cowdung?

what do i do to eliminate odor from cowdung?

Danielcvhjjggjhuuyyguyu, Asxdxxwrefdrtszsdsdreessek question #Minimum 100 w...

Asxdxxwrefdrtszsdsdreessek question #Minimum 100 words accepdhgugfhjugydt76uejjerugrgrted#

Bakelite, Bakelite is a material based on the thermosetting phenol formald...

Bakelite is a material based on the thermosetting phenol formaldehyde resin. Produced by the reaction under heat and pressure of phenol (a toxic, colourless crystalline solid) and

Porosity, Porosity: The property of the refractory brick is the ratio of i...

Porosity: The property of the refractory brick is the ratio of its pore volume to the total volume. The refractory material with high porosity is not preferred for furnace lining

Iron phase chemical analyses, Dear sir I need chemical analysis method for...

Dear sir I need chemical analysis method for pyrite phase in iron ore

Write Your Message!

Captcha
Free Assignment Quote

Assured A++ Grade

Get guaranteed satisfaction & time on delivery in every assignment order you paid with us! We ensure premium quality solution document along with free turntin report!

All rights reserved! Copyrights ©2019-2020 ExpertsMind IT Educational Pvt Ltd