Explain mask alignment and exposure, Chemical Engineering

Assignment Help:

Mask Alignment and Exposure

One of the most significant steps in the photolithography process is mask alignment. A mask or "photomask" is a square glass plate with a patterned emulsion of metal film on single side. The mask is aligned with the wafer, so that the pattern can be transfer onto the wafer surface. Every mask after the first one must be aligned to the last pattern.

Once the mask has been accurately allied with the pattern on the wafer's surface, the photo resist is exposed by the pattern on the mask with a high intensity ultraviolet light. There are three primary exposure methods: contact,  proximity, and projection. They are shown in the figure below.  

 

2123_Untitled.png


Related Discussions:- Explain mask alignment and exposure

Chemical bonding, Why protons doesn''t react which each other?

Why protons doesn''t react which each other?

Entry and exit points features of a laboratory, Entry and exit points Y...

Entry and exit points You should see them from the point of view of access, convenience and safety. 1. Observations 2. Comments and Suggestions

Explain projection printing, Projection Printing Projection printing, k...

Projection Printing Projection printing, keep away from mask damage entirely. An image of the patterns on the mask is projected onto the resist-coated wafer, which are many cen

Invitation of quotations-procedure, PROCEDURE:  Activity 1: Invitation of q...

PROCEDURE:  Activity 1: Invitation of quotations. A format for inviting a quotation is given below. You are required to fill up the form for finding out the prices of the follo

Chlorination, importance of chlorination in water

importance of chlorination in water

Downstream process development, Dear expert minds I have to program in Matl...

Dear expert minds I have to program in Matlab a series of Unit operations for protein purification fro crude mixture. Starting from the centrifugation arriving to the formulation o

Material and energy balances, Wet air containing 4.0 mole% water vapor at 7...

Wet air containing 4.0 mole% water vapor at 76°F and 14.8 psia is passed through a column of calcium chloride pellets. The pellets absorb 97% of the water and none of the other con

Bioprocess engineering, Where can I get the solution manual for bioprocess ...

Where can I get the solution manual for bioprocess engineering by Schuler and kargi? Any link to download it?

Separation process, develop a process schematic which will yield separation...

develop a process schematic which will yield separation process streams

Write Your Message!

Captcha
Free Assignment Quote

Assured A++ Grade

Get guaranteed satisfaction & time on delivery in every assignment order you paid with us! We ensure premium quality solution document along with free turntin report!

All rights reserved! Copyrights ©2019-2020 ExpertsMind IT Educational Pvt Ltd