Explain mask alignment and exposure, Chemical Engineering

Assignment Help:

Mask Alignment and Exposure

One of the most significant steps in the photolithography process is mask alignment. A mask or "photomask" is a square glass plate with a patterned emulsion of metal film on single side. The mask is aligned with the wafer, so that the pattern can be transfer onto the wafer surface. Every mask after the first one must be aligned to the last pattern.

Once the mask has been accurately allied with the pattern on the wafer's surface, the photo resist is exposed by the pattern on the mask with a high intensity ultraviolet light. There are three primary exposure methods: contact,  proximity, and projection. They are shown in the figure below.  

 

2123_Untitled.png


Related Discussions:- Explain mask alignment and exposure

Vapor/liquid quality problem, calculate the volume at (160c) and 221c if th...

calculate the volume at (160c) and 221c if the quality is 0.85

Find the entropy change of the system, A system with constant heat capacity...

A system with constant heat capacity CP and initial temperature T1 is heated by contacting a reservoir at Tf . Find the entropy change of the system, reservoir, and system plus res

What are the objectives of heat treatment of metals, What are the objective...

What are the objectives of heat treatment of metals? Objectives of heat treatment-  Cause relief of internal stresses developed while cold working, welding, casting, forgi

Transparent polymeric materials for eyeglass lenses, a) List various advant...

a) List various advantages and drawbacks of using transparent polymeric materials for eyeglass lenses.  (b) Cite 4 properties (in addition to being transparent) that are important

Fluid Dynamics, If the atmosphere had a constant temperature of 20C and con...

If the atmosphere had a constant temperature of 20C and constant density, how high would the air extend above sea level? Would Mt. Everest, and 10km in elevation, protrude beyond

Radioactivity, what are the applications of radioactivity in engineering

what are the applications of radioactivity in engineering

#esterification, what do i do to eliminate odor from cowdung?

what do i do to eliminate odor from cowdung?

Applications of permanent magnets, Applications of permanent magnets  a...

Applications of permanent magnets  a - Applications based on attraction or repulsion forces  b - Applications based on Faraday's induction law c- Application based on Lor

Write Your Message!

Captcha
Free Assignment Quote

Assured A++ Grade

Get guaranteed satisfaction & time on delivery in every assignment order you paid with us! We ensure premium quality solution document along with free turntin report!

All rights reserved! Copyrights ©2019-2020 ExpertsMind IT Educational Pvt Ltd