Explain mask alignment and exposure, Chemical Engineering

Assignment Help:

Mask Alignment and Exposure

One of the most significant steps in the photolithography process is mask alignment. A mask or "photomask" is a square glass plate with a patterned emulsion of metal film on single side. The mask is aligned with the wafer, so that the pattern can be transfer onto the wafer surface. Every mask after the first one must be aligned to the last pattern.

Once the mask has been accurately allied with the pattern on the wafer's surface, the photo resist is exposed by the pattern on the mask with a high intensity ultraviolet light. There are three primary exposure methods: contact,  proximity, and projection. They are shown in the figure below.  

 

2123_Untitled.png


Related Discussions:- Explain mask alignment and exposure

Electrolysis, Could I get a code on designing electrolytic reactors in the ...

Could I get a code on designing electrolytic reactors in the production of sodium ?

Permeability, Permeability: The rate of diffusion of molten solid liquid a...

Permeability: The rate of diffusion of molten solid liquid and gases through refractories is called permeability. Low permeability is usually more important than low porosity from

Homework, Water from a supply having a total head of 100 ft is used in the ...

Water from a supply having a total head of 100 ft is used in the jet of an ejector in order to lift 10 ft3/s of water from another source (at a lower level) that has a total head o

Reference electrodes, construction and working of calomel and Ag-AgCl elect...

construction and working of calomel and Ag-AgCl electodes

Materials for ac applications, Materials for AC applications  These app...

Materials for AC applications  These applications generally needs low coercivity Hc and low power loss, high permeability µ, high saturation magnetization.  The low value of

Prior preparation for fixing and staining animal tissue, Prior preparation ...

Prior preparation for fixing and staining animal tissue and/or plant tissues: Find out what procedure the lab technician follows for preparing fixative (either plant andor animal)

Write Your Message!

Captcha
Free Assignment Quote

Assured A++ Grade

Get guaranteed satisfaction & time on delivery in every assignment order you paid with us! We ensure premium quality solution document along with free turntin report!

All rights reserved! Copyrights ©2019-2020 ExpertsMind IT Educational Pvt Ltd