Explain mask alignment and exposure, Chemical Engineering

Assignment Help:

Mask Alignment and Exposure

One of the most significant steps in the photolithography process is mask alignment. A mask or "photomask" is a square glass plate with a patterned emulsion of metal film on single side. The mask is aligned with the wafer, so that the pattern can be transfer onto the wafer surface. Every mask after the first one must be aligned to the last pattern.

Once the mask has been accurately allied with the pattern on the wafer's surface, the photo resist is exposed by the pattern on the mask with a high intensity ultraviolet light. There are three primary exposure methods: contact,  proximity, and projection. They are shown in the figure below.  

 

2123_Untitled.png


Related Discussions:- Explain mask alignment and exposure

Explain oxidation, Oxidation - Silicon has the unique ability to be oxidiz...

Oxidation - Silicon has the unique ability to be oxidized into silica, which produces a chemically stable, protective and insulating layer  on the surface of the wafer. The produc

Location and layout, Location and layout : Note the location of the lab wi...

Location and layout : Note the location of the lab with respect to the rest of the building. Is the location satisfactory for efficient functioning? You can study the layout well

Simulation of RDC using Matlab, I need help in developing a program in matl...

I need help in developing a program in matlab that can simulate a reactive distillation column. I have all the required model equations needed for the simulation. pls contact me as

Applications of permanent magnets, Applications of permanent magnets  a...

Applications of permanent magnets  a - Applications based on attraction or repulsion forces  b - Applications based on Faraday's induction law c- Application based on Lor

What is the basis of classification of hot and cold working, What is the ba...

What is the basis of classification of hot and cold working? Cold and hot working: Changing the shape of material by extrusion, forging, rolling, and drawing include plastic

Corrosion, write in brief about pitting and soil corrosion

write in brief about pitting and soil corrosion

Provision for services-gas, Normal 0 false false false fals...

Normal 0 false false false false EN-IN X-NONE X-NONE MicrosoftInternetExplorer4

Write Your Message!

Captcha
Free Assignment Quote

Assured A++ Grade

Get guaranteed satisfaction & time on delivery in every assignment order you paid with us! We ensure premium quality solution document along with free turntin report!

All rights reserved! Copyrights ©2019-2020 ExpertsMind IT Educational Pvt Ltd