Youve just been hired as a process engineer at a major

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Reference no: EM13344013

You've just been hired as a process engineer at a major silicon chip manufacturer and your boss gives you a first task. You are to research the best option for measuring, monitoring and maintaining the temperature of a vertical oxidation furnace made of quartz which will handle 100, 450 mm diameter wafers spaced 0.25" apart. The central zone is to maintain a temperature of 1000 °C. The key priorities in reaching your goal are:

Temperature accuracy: +/- 0.5 °C within the central zone
Lifetime of system: > 5 years
Minimize cost but still achieve the Temp/Lifetime goals

Obtain three designs and specify which is your optimum choice and why, also listing all of your assumptions.

Reference no: EM13344013

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