What temperature must the Cu source be heated

Reference no: EM132324212

Assignment - Please answer this question, Chapter 3 - question from Ohring's book Thin film.

Question - In order to deposit films of the alloy YBa₂Cu₃, the metals Y, Ba, and Cu are evaporated from three point sources. The latter are situated at the corners of an equilateral triangle whose side is 20 cm. Directly above the centroid of the source array, and parallel to it, lies a small substrate: the deposition system geometry is thus a tetrahedron, each side being 20 cm long.

a. If the Y source is heated to 1740 K to produce a vapor pressure of 10^-3 torr, to what temperature must the Cu source be heated to maintain film stoichiometry?

b. Rather than a point source, a surface source is used to evaporate Cu. How must the Cu source temperature be changed to ensure deposit stoichiometry?

c. If the source configuration in part (a) is employed, what minimum O₂ partial pressure is required to deposit stoichiometric YBa₂Cu₃O₇ superconducting films by a reactive evaporation process? The atomic weights are Y = 89, Cu = 63.5, Ba = 137, and O = 16.

Reference no: EM132324212

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