What is the volume of the etch chamber

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Reference no: EM13709896

Question: An etcher has an unknown internal volume. The following experiment is designed to measure its volume. Nitrogen is stored in a 10 liter container outside of the etcher. At 25C, the pressure is measured to be 1200Torr. The 10 liter container is then connected to the etch chamber. The valve between the etch chamber and the container at the moment is still closed. The etch chamber is then pumped down to 10 microTorr and it also sits in 25C. The valve is now opened allowing N2 in the container to be released into the etch chamber. The pressure of the etch chamber is then measured to be 100Torr.

Part A: Ignoring the volume in the piping connecting the chamber and the container, what is the volume of the etch chamber?

I need help to compute what is the volume of the etch chamber.

Reference no: EM13709896

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