What is the separation distance of the sources at the height

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Reference no: EM13255181

You need to coat a 150 cm diameter glass substrate with Cr for the gate electrode layer of a thin-film transistor array backplane. The thickness variation must be within ±10% across the substrate. Your evaporation chamber consists of two sources separated by a distance D and the substrate is at a height h from the sources. What is the minimum height the substrate should be above the source? What is the separation distance of the sources at this height?

Reference no: EM13255181

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