What is the profile of the structure

Reference no: EM131794430

A damascene process is used to fabricate a tungsten via through a SiO2 dielectric layer. First the SiO2 dielectric layer is deposited, with a thickness of 1 p.m.

A via hole is etched in the SiO₂, and W is blanket deposited by CVD. Right after the W deposition. the Degree of Planarization (DOI;) equals 1.0. and the thickness of the W directly above the dielectric layer is equal to 0.8 µm.

A plasma etch back of the W layer is now done to remove the W that covers the top of the dielectric layer, and leaving the W only in the via hole.

If the etch rate of the W in the etch-back process is 5.0 nm sec;, and the etch selectivity of W with respect to SiO₂ is 4:1, what is the profile of the structure after 180 sec of etching? Specify the heights of the W and SiO₂ layers in am.

(Neglect any variations in thicknesses or etch rate.)

Reference no: EM131794430

Questions Cloud

Ethical reasoning and moral decision making : What can you learn from Ethical Reasoning and Moral Decision Making and a busniess ethicals course.

What is the minimum cmp etch time needed to obtain : If the CMP etch rate is 0.12 pm per minute, what is the minimum CMP etch time needed to obtain this net DO of 17 Assume no variations in thicknesses.

Problem of the hamilton corporation : The Hamilton Corporation has 2 million shares of stock outstanding and will report earnings of $6,700,000 in the current year.

Cost leader versus a market leader strategy : describe 3 differences in what you would focus on based on whether your organization has a "cost leader" versus a "market leader" strategy.

What is the profile of the structure : What is the profile of the structure after 180 sec of etching? Specify the heights of the W and SiO2 layers in am.

Prepare a statement of cash flows : Prepare a statement of cash flows, using the indirect method of reporting cash flows from operating activities - Fully depreciated equipment costing

Calculate calvins charitable contribution deduction : Calvin reviewed his cancelled checks and receipts this year for charitable contributions. Calculate Calvin's charitable contribution deduction and carryover.

Concepts to training and development initiatives : How might we apply these concepts to training and development initiatives?

Problem on the preferred stock expected return : (Preferred stock expected return) You are planning to purchase 200 shares of preferred stock and must choose between Stock A and Stock B.

User Account

All Pages