What is the minimum size and space

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1. If vertical walled through-wafer structures are made, what is the minimum size and space that can be realized by:

(a) DRIE,

(b) wet etching and

2. The deflection of a circular membrane under pressure is given by h = 0.666 (r ⁴?p/Et) ^1/3, where r is the radius, t the thickness and E the Young's modulus of the diaphragm. What is the deflection that corresponds to a pressure difference of 25 mtorr? What is the corresponding capacitance change?

Reference no: EM131403948

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