What is the maximum number of defects

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An oncoming 150-mm wafer has 10 randomly spaced point defects on it. The chip size is 1.0 cm², and the final target yield is 75%. If there are eight additional processing levels, what is the maximum number of defects that we can afford to accumulate on each level? (Use the Poisson yield model.)

Reference no: EM131297540

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