What is copper plug resistance in 0.1µm technology

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Reference no: EM131403945

1. If a 2:1 aspect ratio via plug in 0.25µm technology has a resistance of 0.4 Ω, is it made of tungsten or copper?

2. What is copper plug resistance in 0.1µm technology?

3. What is the breakdown field requirement for low-k dielectrics?

Reference no: EM131403945

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