What energy and dose would you use to achieve the condition

Reference no: EM131793836

We want to design an implant step which will implant phosphorus ions through. 50 nm of SiO2 into an underlying silicon substrate such that the peak concentration in, the substrate is 1 x 10¹⁷ cm^-3 and the concentration at the SiO₂/Si interface is 1 X 10¹⁵ cm^-3.

What energy and dose would you use to achieve these conditions?

Assume that the stopping power of SiO₂ is the same as that of silicon. Neglect channeling effects.

Reference no: EM131793836

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