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What are the principles of operation

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Reference no: EM13887397

Vacuum Systems

Research a type of pump that we did NOT discuss: the ion pump

- What are the principles of operation?

- What is its ultimate pressure?

- What limits its performance practically?

- What type of system is it generally used on?

Thin Films

Research and describe a layering technology we did NOT discuss: Atomic Layer Deposition (ALD)

• What type of deposition is this and how does it differ from other techniques of the same type?

• What are the key components/reactions?

• Describe the process

• Give at least one example of its use in current (>2000) literature (describe why it was important in that case)

Reference no: EM13887397

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