What are the dimensional limitations of the hexsil process

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1. If 20µm thick nickel pillars are needed as masters, and master fabrication is by photolithography, what is the smallest feature size that can be fabricated?

2. What are the dimensional limitations of the HexSil process?

3. How can you make hemispherical microlenses by moulding/stamping methods?

Reference no: EM131403953

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