The capacitance of a mos structure

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Reference no: EM131032538

The capacitance of a MOS structure is shown in the attached figure.  (n+ polysilicon gate, SiO2 insulator, Si substrate). The plot is not necessarily to scale.

(A). Is the Si substrate n-type or p-type? Is the channel n-type or p-type? Is it NMOS or PMOS? Explain.

(B). Given substrate doping of 1E16cm-3(you will have to identify the doping type from (A)), and oxidethickness Tox = 200A°. Find Ci and Cmin, which are the maximum and minimum MOS capacitance values.

(C). Qualitatively plot the C-V curve for the same device measured at high frequency. Which operation region (accumulation, depletion, inversion) is different? Explain the difference.

914_mos_cap.png

Reference no: EM131032538

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