Provide an equation in terms of the range

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Reference no: EM131793834

How thick does a mask have to be to reduce the peak doping of an implant by a factor of 10,000 at the mask/substrate boundary?

Provide an equation in terms of the range and the standard deviation of the implant profile.

Reference no: EM131793834

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Provide an equation in terms of the range : How thick does a mask have to be to reduce the peak doping of an implant by a factor of 10,000 at the mask/substrate boundary?

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