Plot the deposition rate for a cvd system

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a. Plot the deposition rate (on a log scale) versus 1/T (Kelvin), for 600-1200°C. for a CVD system with the following parameter values:

b. Redo the problem when the total pressure is decreased to 1 tort. so that he in-creases by 100 times.

Assume that the partial pressure of the incorporating species remains the same. and Cr decreases by the same factor as the total pressure.

Reference no: EM131794366

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