Obtain reproducible results in an epitaxial deposition

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In an epitaxial deposition, under mass transfer limited conditions, is it more important to control the reactor temperature or the source gas composition in the gas stream to obtain reproducible results? Why?

The response must be typed, single spaced, must be in times new roman font (size 12) and must follow the APA format.

Reference no: EM131794385

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Obtain reproducible results in an epitaxial deposition : In an epitaxial deposition, under mass transfer limited conditions, is it more important to control the reactor temperature or the source gas composition.
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