Mos technology is used to fabricate a capacitor utilizing

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MOS technology is used to fabricate a capacitor, utilizing the gate metallization and the substrate as the capacitor electrodes. Find the area required per 1-pF capacitance for oxide thickness ranging from 5 nm to 40 nm. For a square plate capacitor of 10 pF, what maximum dimensions are needed?

Reference no: EM13628774

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