How much ti is needed if all is consumed

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Reference no: EM131794445

For 0.35-pm technology, the junction depth (before silicidation) is about 100nm.

If you want to leave 50 nm of Si after silicidation to ensure low leakage current, how much TISi₂ is formed and how much Ti is needed if all is consumed?

Reference no: EM131794445

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