How many oxide plasma etchers are needed

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Reference no: EM131186500

If a multilevel metallization process consists of 10 layers, how many oxide plasma etchers are needed to etch contact holes if the oxide etch rate is 1 μm/min, in a 100 000 WPM fab?

Reference no: EM131186500

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How many oxide plasma etchers are needed : If a multilevel metallization process consists of 10 layers, how many oxide plasma etchers are needed to etch contact holes if the oxide etch rate is 1 μm/min, in a 100 000 WPM fab?

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