How impurity atoms are distributed after drive-in process

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Reference no: EM13248362

1.Explain aluminum migration in device contacts, and propose possible solutions for the aluminum spikes caused by the migration.

2.What are the two methods for the first step of impurity doping? Why a second drive-in step is needed? How the impurity atoms are distributed after the drive-in process?

Reference no: EM13248362

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