How changing the gas pressure in a standard pvd system

Reference no: EM131794350

a. Using schematic diagrams, show qualitatively how changing the gas pressure in a standard PVD system (using an appropriate Se value for this type of system) can affect the deposition profile when depositing a material on a narrow trench structure.

b. In a similar fashion, show how changing the sticking coefficient affects the de-position profile when depositing a material on topography with a step.

Reference no: EM131794350

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