Find the oxide removal rate

Assignment Help Chemistry

Reference no: EM131297629

1. Assume 100-keV boron implants on a 200-mm silicon wafer at a dose of 5 × 10¹⁴ ions/cm². The projected range and project straggle are 0.31 and 0.07 µm, respectively. Calculate the peak concentration and the required ion-beam current for 1 min of implantation.

2. In a CMP process, the oxide removal rate and the removal rate of a layer underneath the oxide (called a stop layer) are 1r and 0.1r, respectively. To remove 1 µm of oxide and a 0.01-µm stop layer, the total removal time is 5.5 min. Find the oxide removal rate.

Reference no: EM131297629

Questions Cloud

Do you agree or disagree that earths land area should be put : Do you agree or disagree that 20% of the Earth's land area should be put aside, or is it to difficult to protect that much land? Please explain your answer.

Product that make some sort of sustainability claim : What does this label mean to you (i.e., how do you interpret the label) - Is it clear and informative, what makes it clear or not and Do you think it is misleading in any way, if yes, how so?

Why does canondales survival depend on its innovation : Why does Canondale's survival depend on its innovation and quality control?- Why is it important for Canondale to meet international standards when making its bikes?

Define each component of an information system : Define each component of an information system. Define how you can use the five-component model to guide your learning and thinking about information systems.

Find the oxide removal rate : In a CMP process, the oxide removal rate and the removal rate of a layer underneath the oxide (called a stop layer) are 1r and 0.1r, respectively. To remove 1 µm of oxide and a 0.01-µm stop layer, the total removal time is 5.5 min. Find the oxide ..

How might a firm benefit from meeting iso standards : What are ISO standards? How might a firm benefit from meeting ISO standards? How would a firm go about becoming ISO compliant?

Your stock portfolio consists of only two stocks : Your stock portfolio consists of only two stocks. You have $115,000 in Company A and $125,000 in Company B. Company A has an actual return of -8%, and Company B has a return of 12%. What is the return on your portfolio?

Should we mount a massive effort to restore ecosystems : Should we mount a massive effort to restore ecosystems that we have degraded even though this will be quite costly? For this weeks environmental controversy we explore this question.

What is the maturity risk premium for two-year security : The real risk-free rate is 3%, and inflation is expected to be 2% for the next 2 years. A 2-year Treasury security yields 7.8%. What is the maturity risk premium for the 2-year security?

User Account

All Pages