Find out the activation energies for cvd growth

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Reference no: EM13671546

You are comparing low temperature CVD growth of metal alloys from a variety of metal-organic precursors. In a design-of-experiments exercise to do this, you measure growth rates at various temperatures. For a Cu precursor you find that the growth rate raise by a factor of 10 from 200 to 400C, while that the increase is only a factor of 5 for a Ni precursor over the same temperature range.

a) Find out the activation energies for CVD growth from each of the precursors.

Reference no: EM13671546

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