Explain the source of phosphorous the surface concentration

Reference no: EM13309584

You are managing a semiconductor fabrication line and have been told to increase the rate of production of phosphorous doped silicon wafers. Based on the source of phosphorous (which cannot be changed) the surface concentration is 400 P atoms per 10 million Si atoms. Estimate the temperature you should dope at (C) if you must have a concentration of 100 P atoms per 10 million Si atoms at a depth of 10 nm in 5 minutes.

Reference no: EM13309584

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