Estimate the worst-case varation in film thickness

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Reference no: EM13247123

A wafer 100mm in diameter is mounted in an electron-beam evaporation system in which the spherical radius is 40cm. Use Eq. 6.7 to estimate the worst-case varation in film thickness between the center and edges of the afer for an evaporated aluminum film 1 um think.

Reference no: EM13247123

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