Device of current interest to micro and nanofabrication

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The report should review the process technology aspects of a device of current interest to micro- and nanofabrication. While background information is usually necessary, the emphasis of the report should be more on how to make it rather than how it works. Superior works should demonstrate how the advances in micro- and nanofabrication improve the device performance, add more functions to the device, or enable new applications.

Reference no: EM132910019

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