Design a silicon cantilever with a 2 µm thick zno film

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Design a silicon cantilever with a 2 µm thick ZnO film on it and electrodes above and below the ZnO film such that an applied voltage can result in the free end of the cantilever being tipped by 30°. Such a device could be used to manipulate a micromirror attached to the free end of the cantilever. Specify the length and thickness of the cantilever, and the voltage required to achieve the bending. (This is an underconstrained problem. There are many possible solutions. Try to select one that can be readily fabricated.)

Reference no: EM131271834

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