Can rbs be used to measure dopant profiles

Reference no: EM131403989

1. AFM scan area is 1 × 1 µm, which corresponds to 512 × 512 pixels. What should the AFM-tip radius be so that resolution is tip-limited?

2. Estimate the analytical radius of electron microprobe (EMPA).

3. Can RBS be used to measure dopant profiles?

4. If electron beam is focussed to a 15 nm spot, and at least 100 Auger events (electrons) must be collected to get a signal, what is the detection limit of Auger microprobe?

Reference no: EM131403989

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