Calculate the junction depth where the phosphorus meets

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Reference no: EM131793940

Phosphorus is implanted at 50 keV with a dose of 1 x 10¹⁴ cm^-2.

Calculate the junction depth where the phosphorus meets the substrate (p type. 1 x 10¹⁵cm^-3) after

(a) a 900°C, three-hour anneal and

(b) a 1200°C. three-hour anneal.

Reference no: EM131793940

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