Calculate the fraction of the implanted dose

Reference no: EM131793924

An amorphizing implant is performed using a high dose of arsenic (5 x 10⁵ cm^-2, 200 keV) and TEM cross-section images indicate complete amorphization to a depth of 50 nm.

If Solid-Phase Epitaxial (SPE) regrowth instantly removes all of the damage in the amorphous region, calculate the fraction of the "+1" implanted dose that is available for TED.

Reference no: EM131793924

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