Calculate the deposition rate for a small planar surface

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Calculate the deposition rate for a small planar surface evaporation source winch θi = 300. θk = 45°, the evaporation rate is I X 10-1 gm sec-1. the distance from the source to the wafer is 5 cm, and the density of the material being deposited equal 5 gm cm-3.

Reference no: EM131794361

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